| 摘要 |
PROBLEM TO BE SOLVED: To solve the problems wherein a well-known microminiature spring load type LVDT is unsuitable for inspection of many mounted components because a probe and a detector are used as a pair therefor, and accurate operation thereof cannot be expected even when driven by the power for high frequency excitation by using an electronic component in a comparatively inexpensive zone. SOLUTION: This linear scale probe is constituted, which is used for each detection part of a plurality of electronic components mounted on a substrate, and used for a substrate inspection system, and movable in a casing where at least one slit is formed, extended in the bus direction, and having the length covering the inside of a distance range where a magnetic body is moved and the width wherein a current passage of an eddy current generated in the casing by application of a high frequency wave can cross, whose one end is elongated to the outside, and whose other end is equipped with a movable shaft provided with the magnetic body; a primary coil wherein the power for high frequency excitation is applied to a position facing to the magnetic body, for emitting an electric field; and a secondary coil divided in two for taking an induced current generated by movement of the magnetic body in the electric field. COPYRIGHT: (C)2008,JPO&INPIT
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