VAPOR DEPOSITION SYSTEM, VAPOR DEPOSITION METHOD, ORGANIC LIGHT EMITTING DEVICE AND DISPLAY

摘要

PROBLEM TO BE SOLVED: To uniformly vapor-deposit a vapor deposition material such as an organic material in which control to heat is important at stable performance over a long period. SOLUTION: The vapor deposition system includes: a material holding part 11 packed with a vapor deposition material and heating the same 11; an opening 12 scattering the vapor deposition material 10 evaporated from the material holding part 11 toward the member 20 to be vapor-deposited; and a high temperature body 13 arranged between the material holding part 11 and the opening 12 and heated to a temperature T1 higher than the temperature T2 of the vapor deposition material 10 heated by the material holding part 11. COPYRIGHT: (C)2008,JPO&INPIT