发明名称 Method for preparing a cover for protecting a component on a substrate
摘要 A method for preparing a cover on a substrate in particular for the encapsulation of electronic, optical, optoelectronic components, of the electromechanical microsystems type, also known as Micro-Electro-Mechanical Systems (MEMS) or optoelectromechanical microsystems, also known as Micro-Opto-Elect-Mechanical systems (MOEMS), joined to the substrate.
申请公布号 US2008180890(A1) 申请公布日期 2008.07.31
申请号 US20080011333 申请日期 2008.01.25
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE 发明人 BOLIS SEBASTIEN
分类号 H05K5/00;H01S4/00 主分类号 H05K5/00
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