| 摘要 |
<p>A conveyance position aligning method for a conveyance system, effectively performing highly accurate conveyance position alignment independent of mounting conditions of modules forming the conveyance system. The conveyance position aligning method performs, in conveyance of a dummy wafer (Wd) between an orienter (320) and a second processing chamber (220B) through conveyance paths (X23, X24), a step of obtaining a coordinate system for positional displacement correction, the coordinate system being obtained by acquiring a direction in which displacement of a conveyance position occurring at the orienter can be adjusted and which corresponds to a direction in which displacement of a conveyance position occurring at the processing chamber, a step of returning the dummy wafer, which is conveyed from the orienter to the second processing chamber through standard conveyance routes (X21, X22), to the orienter from the second processing chamber through the conveyance routes (X23, X24) and detecting positional displacement of the dummy wafer before and after the conveyance, and a step of correcting, in order that the detected positional displacement is eliminated, displacement of a conveyance position at the second processing chamber caused by the conveyance routes (X23, X24), the correction being based on the coordinate system for positional displacement correction.</p> |
