A method for fabricating nanogap and nanogap sensor,申请号KR20060072981-传众专利搜索

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发明名称	A method for fabricating nanogap and nanogap sensor
摘要
申请公布号	KR100849384(B1)	申请公布日期	2008.07.31
申请号	KR20060072981	申请日期	2006.08.02
申请人		发明人
分类号	H01L21/302;H01L21/027	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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