| 摘要 |
<P>PROBLEM TO BE SOLVED: To measure a position of an object to be measured with a simple structure about an imaging device, an alignment method, and an alignment device. <P>SOLUTION: The imaging device comprises a photographing optical system 21 having a magnification of a part close to an optical axis different from a mgnification of a part distant from the optical axis; an imaging means 27 for imaging the object to be photographed from the photographing optical system; and a picture image processing means 17 for obtaining a shift length from the optical axis of a center of the object to be photographed on the basis of a distortion of the object to be photographed by the imaging means. <P>COPYRIGHT: (C)2008,JPO&INPIT |
