STRONTIUM DOPING OF MOLTEN SILICON FOR USE IN CRYSTAL GROWING PROCESS

摘要

A PROCESS FOR PREPARING STRONTIUM DOPED MOLTEN SILICON FOR USE IN A SINGLE SILICON CRYSTAL GROWING PROCESS IS DISCLOSED. POLYSILICON IS DOPED WITH STRONTIUM AND MELTED IN A SILICA CRUCIBLE (10).DURING MELTING AND THROUGHOUT THE CRYSTAL GROWING PROCESS THE STRONTIUM ACTS AS A DEVITRIFICATION PROMOTER (24) AND CREATES A LAYER OF DEVITRIFIED SILICA ON THE INSIDE CRUCIBLE SURFACE (16, 18) IN CONTACT WITH THE MELT RESULTING IN A LOWER LEVEL OF CONTAMINANTS IN THE MELT AND GROWN CRYSTAL.(FIG 2)