SYSTEM, METHOD AND COMPUTER PROGRAM PRODUCT FOR EVALUATING AN ACTUAL STRUCTURAL ELEMENT OF AN ELETRICAL CIRCUIT

摘要

A method, a system and a computer program product for evaluating an actual structural element of an electrical circuit. The method includes: detecting an actual structural element contour by processing a scanning electron microscope image of the actual structural element; aligning the actual structural element contour with a simulated contour to provide an aligned actual structural element contour; wherein the simulated contour is obtained by simulating a lithographic process that is responsive to a design contour; and comparing between the aligned actual structural element contour and reference information.