SYSTEM AND METHOD FOR CONTROLLED MIXING OF FLUIDS AND MULTIPLEXING SETPOINTS
摘要
Embodiments of the present invention provide a system (100, 300, 500) and method for continuous flow production of mixed fluids. The mixed fluids can comprise a mixture of different fluids or a mixture of the same fluid having different input properties such as temperature. Additionally, embodiments of the present invention provide a system (900, 1100) and method for multiplexing analog setpoints.
申请公布号
WO2007103184(A3)
申请公布日期
2008.07.31
申请号
WO2007US05377
申请日期
2007.02.28
申请人
ENTEGRIS, INC.;NIERMEYER, J., KARL;MCLOUGHLIN, ROBERT, F.;SMITH, JOSEPH, E.
发明人
NIERMEYER, J., KARL;MCLOUGHLIN, ROBERT, F.;SMITH, JOSEPH, E.
