| 摘要 |
The present invention concerns a rotary vacuum pump (101) including a plurality of pumping stages obtained through the cooperation between alternate rotor discs (123) and stator discs or rings (115), at least one duct (135, 127) for introducing a gas or a gas mixture into the pump, said duct being interrupted by an electrically controllable valve (133), and an electronic control device (129) programmed to detect at least one operating parameter of the pump and to modify the configuration of said valve (133) so as to cause an increase or a decrease in the amount of gas passing through said duct (135) based on the detected value of said parameter. The invention further concerns a method of operating said pump, a pumping system including one or more such vacuum pumps and a method of operating said pumping system. |
