| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a chucking device provided with a detection part detecting an amount of opening and closing of a gripping part with high precision by a simple configuration while reducing the size of this device by providing a detection part. <P>SOLUTION: This chucking device is constituted by opening and closing one set of a first finger 20a and a second finger 20b constituting the gripping part 22, along a base body 36 by displacing a piston 14 by pressurized fluid supplied into a chuck body 12, by inserting an axial bobbin 78 into the inside of the first and second fingers 20a, 20b, and by winding a coil 86 around a small-diameter part 90 of the bobbin 78. This chucking device detects the amount of opening and closing of the gripping part 22, based on changes of impedance of the coil 86 in accordance with opening and closing of the first and second fingers 20a, 20b. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
