发明名称 |
Nanotransfer and nanoreplication using deterministically grown sacrificial nanotemplates |
摘要 |
Methods, manufactures, machines and compositions are described for nanotransfer and nanoreplication using deterministically grown sacrificial nanotemplates. An apparatus, includes a substrate and a nanoreplicant structure coupled to a surface of the substrate.
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申请公布号 |
US2008182068(A1) |
申请公布日期 |
2008.07.31 |
申请号 |
US20070985395 |
申请日期 |
2007.11.13 |
申请人 |
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发明人 |
MELECHKO ANATOLI V.;MCKNIGHT TIMOTHY E.;GUILLORN MICHAEL A.;ILIC BOJAN;MERKULOV VLADIMIR L.;DOKTYCZ MITCHEL J.;LOWNDES DOUGLAS H.;SIMPSON MICHAEL L. |
分类号 |
B32B9/04;B01D67/00;B01D71/02;B01J23/755;B01L3/00;H01L21/44 |
主分类号 |
B32B9/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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