发明名称 Apparatus, method and system for providing enhanced mechanical protection of thin beams
摘要 An arrangement for a micro-mechanical beam includes a support structure to provide an increase in bending stiffness of the micro-mechanical beam without significantly influencing torsional stiffness, where the support structure is configured to directly attach to the micro-mechanical beam.
申请公布号 US2008180821(A1) 申请公布日期 2008.07.31
申请号 US20080009875 申请日期 2008.01.22
申请人 NIENDORF ANDREAS;FREY WILHELM;PAN ZHIYU 发明人 NIENDORF ANDREAS;FREY WILHELM;PAN ZHIYU
分类号 G02B7/182;G02B26/10;B81B3/00;B81B7/00;G02B26/08 主分类号 G02B7/182
代理机构 代理人
主权项
地址