发明名称 |
WORKPIECE TRANSFER SYSTEM, TRANSFER METHOD, AND SEMICONDUCTOR MANUFACTURING APPARATUS |
摘要 |
<p>A conveyance system E for wafers W includes a host computer 1 for carrying out the management of the production of semiconductor devices, a plurality of probers 2 for inspecting the electric characteristics of the wafers W under the administration of the host computer 1, an AGV 3 for automatically transporting the wafers W in block of a carrier in order to deliver the wafers W one by one to these probers 2 according to respective demands and an AGV controller 4 for controlling the operation of the AGV 3 under the administration of the host computer 1. <IMAGE></p> |
申请公布号 |
KR100849511(B1) |
申请公布日期 |
2008.07.31 |
申请号 |
KR20037008715 |
申请日期 |
2003.06.27 |
申请人 |
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发明人 |
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分类号 |
H01L21/66;G05B19/00;G05B19/418;H01L21/00;H01L21/68 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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