Components for a plasma processing apparatus are provided, including fastener members adapted to accommodate the stresses generated during thermal cycling. The fasteners include deflectable spacers to accommodate forces generated by the difference in thermal expansion while minimizing generation of additional particulate contamination.
申请公布号
WO2008063324(A3)
申请公布日期
2008.07.31
申请号
WO2007US22027
申请日期
2007.10.16
申请人
LAM RESEARCH CORPORATION;DE LA LLERA, ANTHONY;ULLAL, SAURABH, J.