| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a flaw detector capable of reducing the misdetection of a flaw, and to provide a flaw detection method. <P>SOLUTION: A transformation part 24 for time delay coordinate system transforms data comprising the pixel values of respective pixels which constitute the image of an inspection target having a cycle pattern formed thereto to the data of a time delay coordinate system of a dimension (m) (m is an integer of 2 or above). A flaw detection part 25 judges whether the position showing the data of the time delay coordinate system is contained in a predetermined region on an (m) dimensional space to detect the flaw on the basis of the judge result. <P>COPYRIGHT: (C)2008,JPO&INPIT |
