| 摘要 |
PROBLEM TO BE SOLVED: To make it possible to operate a depressurized chamber continuously under depressurization and discharge drain rapidly and certainly from a drain separating chamber by installing a plurality of drain separating chambers. SOLUTION: By the method for discharging drain from the drain separating chamber of a negative pressure forming device installing gas purge routes 11-16 from the reduced pressure chamber 1 to a vacuum pump 4 through the drain separating chambers 2, 3, the inside of the reduced pressure chamber 1 is turned depressurized by making the gas purge routes communicate with a part of discharge gas of the two or more drain separating chambers 2, 3 parallely installed to the reduced pressure chamber 1 and the inside of the other drain separating chambers is brought under the atmosphere of a higher pressure than the atmospheric pressure by introducing at least a part of discharge gas of the vacuum pump 4 in the other drain separating chambers, and then drain is discharged from the drain separating chamber by opening drain valves 19, 20 and the depressurization process or the drain discharging process is successively changed by the plurality of drain separating chambers 2, 3. COPYRIGHT: (C)2008,JPO&INPIT |
