发明名称 SEMICONDUCTOR DEVICE TAB TAPE CARRIER AND METHOD FOR MANUFACTURING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device TAB tape carrier which has an evenly high bump whose upper surface is flat and whose width is not widened in the width direction of the wiring and in the pitch direction between the bumps, suppresses or eliminates the generation of defect in juncture with the semiconductor device and the generation of defect in short-circuiting of bumps, and copes with fine pitching, and also to provide a method for manufacturing the same. SOLUTION: A pattern of the wiring 2 is formed by performing pattern processing on a conductive foil or a conductive plate like a copper foil 11 in etching process, a pattern of the bump 5 is also formed, and half etching is performed on the pattern 14 of the wiring 2 to thin the wiring 2 further than the bump 5, thereby relatively thickening the bump 5 further than the wiring 2. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008177467(A) 申请公布日期 2008.07.31
申请号 JP20070011238 申请日期 2007.01.22
申请人 HITACHI CABLE LTD 发明人 TANAKA KANJI;MORITA MASAMIKI
分类号 H01L21/60 主分类号 H01L21/60
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