| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and a device for removing a foreign matter capable of shortening a time required for removing the foreign matter and for inspecting whether the foreign matter has been removed or not. SOLUTION: A foreign matter removing device 1 comprises a microscope 4 equipped with an objective lens 41. The foreign matter removing device 1 comprises removing means 5 and 7 each removing a foreign matter while maintaining the objective lens 41 at a position where the foreign matter is focused, and a sucking means 6 for sucking the foreign matter while maintaining the objective lens 41 at a position where the foreign matter is focused. Accordingly, immediately after the foreign matter is focused by the objective lens 41, the foreign matter is removed and sucked. Further, immediately after the foreign matter is removed and sucked, inspection whether the foreign matter has been removed or not can be preformed using the microscope 4. Thus, the time required for removing the foreign matter and the time required for inspecting whether the foreign matter has been removed or not can be shortened. COPYRIGHT: (C)2008,JPO&INPIT
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