| 摘要 |
PROBLEM TO BE SOLVED: To provide a technology for locating a manufacturing process causing dense defects, even if a plurality of dense defects occur on a single substrate. SOLUTION: A plurality of divided regions are set on a substrate by a divided region setting part 121. A divided region totalizing part 122 totalizes the number of correct articles and defective articles contained in each of the divided regions. A feature quantity calculating part 123 identifies a substrate which includes deviation in the number of defective articles contained in one divided region. A defective process identifying part 124 identifies a manufacturing process which has deviation in manufacturing equipment through which the substrate, judged to have deviation in the number of defective articles, has passed. COPYRIGHT: (C)2008,JPO&INPIT
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