MANUFACTURING METHOD OF THIN FILM LAYERED PRODUCT, MANUFACTURING APPARATUS OF THIN FILM LAYERED PRODUCT, MAGNETIC RECORDING MEDIUM AND MAGNETIC RECORDING AND REPRODUCING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a magnetic recording medium as a thin film layered product from which a high SNR can be obtained, its manufacturing method, a manufacturing apparatus of the magnetic recording medium and a magnetic recording and reproducing device using the magnetic recording medium. SOLUTION: The manufacturing method of the thin film layered product has at least one of a first process for simultaneously housing a plurality of substrates for film-deposition in sputtering chambers and film-depositing a thin film on any one substrate for film-deposition of the plurality of substrates for film deposition while heating the other substrate for film-deposition on standby before film-deposition and a second process for heating the substrate for film-deposition on which the thin film is film-deposited in the first process while film-depositing the thin film on any one substrate for film-deposition, when the substrates for film-deposition are sequentially conveyed in the plurality of sputtering chambers and the thin films are film-deposited on the substrates for film-deposition using a sputtering method. COPYRIGHT: (C)2008,JPO&INPIT