| 摘要 |
PROBLEM TO BE SOLVED: To effectively perform accurate conveying position alignment regardless of a real mounting condition of a module constituting a conveying system. SOLUTION: A conveying position alignment method for a conveying system comprises: a step of obtaining a coordinates system for position gap compensation by acquiring the direction capable of compensating position gaps of a conveying position with an orienter corresponding to the direction capable of compensating position gaps of conveying positions at a second processing chamber when a dummy wafer Wd is conveyed between the orienter 320 and second processing chamber 220B through conveying routes X23 and X24; a step of detecting the position gap of the dummy wafer after and before conveying the dummy wafer so that the dummy wafer conveyed from the orienter to the second processing chamber through the reference conveying routes X21 and X22 is returned from the second processing chamber to the orienter through the conveying routes X23 and X24; and a step of compensating the conveying position in the second processing chamber through the conveying routes X23 and X24 so as to get rid of the detected position gap on the basis of the coordinates system for position gap compensation. COPYRIGHT: (C)2008,JPO&INPIT
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