| 摘要 |
<P>PROBLEM TO BE SOLVED: To enhance the throughput of the substrate treatment by using a substrate conveying device having a small occupied area. <P>SOLUTION: Upper and lower roller carrying conveyors 120, 140, and an elevating/lowering mechanism 118 for elevating/lowering the roller carrying conveyors 120, 140 are provided in a substrate conveying device 100. A glass substrate G is placed on the lower roller carrying conveyor 140 while conveying the glass substrate G by the upper roller carrying conveyor 120. Further, the glass substrate G is placed on the upper roller carrying conveyor 120 while conveying the glass substrate G by the lower roller carrying conveyor 140. By elevating/lowering the roller carrying conveyors 120, 140 by the elevating/lowering mechanism 118, the carrying and placing works can be repeated, and the glass substrate G is carried to an excimer UV irradiation apparatus 20 as necessary. <P>COPYRIGHT: (C)2008,JPO&INPIT |
