发明名称 SILICON FUSION VESSEL AND FUSION DEVICE USING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a fusion vessel and a fusion device using this vessel, capable of efficiently fusing metal, by restraining generation of a skull in the vessel. SOLUTION: This invention is related to the fusion vessel for melting a refining raw material by irradiating an electron beam in a vacuum, and has a vessel body 5 composed of copper capable of being cooled by water and having a predetermined-shaped storage part, and forms a curved surface part in a corner part of a storage part of the vessel body 5. This invention can also be so constituted that both a radius of curvature R<SB>f</SB>of the curved surface part of the corner part in a plan view of the vessel body 5 and a radius of curvature R<SB>s</SB>of the curved surface part of the corner part in a cross-sectional drawing of the vessel body 5, become within the same range, and is desirably constituted so that both the radius of curvature R<SB>f</SB>of the curved surface part of the corner part in the plan view of the vessel body 5 and the radius of curvature R<SB>s</SB>of the curved surface part of the corner part in the cross-sectional drawing of the vessel body 5, become 10 to 40 mm. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008175479(A) 申请公布日期 2008.07.31
申请号 JP20070010077 申请日期 2007.01.19
申请人 ULVAC JAPAN LTD 发明人 NAGATA HIROSHI;HIROSE YOICHI;OKUBO HIROO
分类号 F27D11/08;C01B33/02;C22B9/22;F27B14/04;F27B14/10 主分类号 F27D11/08
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