| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an ITO (Indium Tin Oxide) target including calcium of about 0.001 to 10% by atom, compared with an indium atom, and an ITO transparent electrode for a display apparats manufactured from an ITO target. <P>SOLUTION: A method of manufacturing the ITO target includes: preparing a slurry by mixing an indium oxide powder, a tin oxide powder, and a calcium-containing compound powder; granulating the slurry by milling and drying the slurry to prepare a granulated powder; shaping the granulated powder to form a shaped body; and sintering the shaped body. The ITO target including calcium manufactured by the method can reduce a number of times nodules and arcs are generated during sputtering, thereby growing a film which is able to be used for a long period of time. <P>COPYRIGHT: (C)2008,JPO&INPIT |
