发明名称 THIN FILM TRANSISTOR, METHOD OF PRODUCING THE SAME, AND DISPLAY DEVICE USING THE THIN FILM TRANSISTOR
摘要 It is an object to obtain a display device which has a thin film transistor using a semiconductor film, and in which initial failures are reduced, and a high-resolution display due to miniaturization of the thin film transistor is enabled. In a thin film transistor, a gate electrode 6 is formed above a polycrystalline semiconductor film 4 via a gate insulating film 5. A taper angle theta 2 of a section of a pattern end portion of the polycrystalline semiconductor film 4 in a region where the polycrystalline semiconductor film 4 and the gate electrode 6 intersect with each other is smaller than a taper angle theta 1 of the other region.
申请公布号 US2008179600(A1) 申请公布日期 2008.07.31
申请号 US20070954338 申请日期 2007.12.12
申请人 MITSUBISHI ELECTRIC CORPORATION 发明人 TAKEGUCHI TORU
分类号 H01L29/10;H01L21/00 主分类号 H01L29/10
代理机构 代理人
主权项
地址