发明名称 |
FERROELECTRIC VARACTORS SUITABLE FOR CAPACITIVE SHUNT SWITCHING |
摘要 |
A ferroelectric varactor suitable for capacitive shunt switching is disclosed. High resistivity silicon with a SiO<SUB>2</SUB> layer and a patterned metallic layer deposited on top is used as the substrate. A ferroelectric thin-film layer deposited on the substrate is used for the implementation of the varactor. A top metal electrode is deposited on the ferroelectric thin-film layer forming a CPW transmission line. By using the capacitance formed by the large area ground conductors in the top metal electrode and bottom metallic layer, a series connection of the ferroelectric varactor with the large capacitor defined by the ground conductors is created. The large capacitor acts as a short to ground, eliminating the need for vias. The varactor shunt switches can be used to create a bandpass filter and a tunable notch filter. The bandpass filter is implemented by cascading the switches, and the bandpass filter implemented through the use of a resonance circuit.
|
申请公布号 |
WO2008042998(B1) |
申请公布日期 |
2008.07.31 |
申请号 |
WO2007US80368 |
申请日期 |
2007.10.04 |
申请人 |
UNIVERSITY OF DAYTON;SUBRAMANYAM, GURU;VOROBIEV, ANDRE;GEVORGIAN, SPARTAK |
发明人 |
SUBRAMANYAM, GURU;VOROBIEV, ANDRE;GEVORGIAN, SPARTAK |
分类号 |
H01L27/08;H01P1/10;H01P1/18 |
主分类号 |
H01L27/08 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|