发明名称 ROTATIONAL POSITIONER AND METHODS FOR SEMICONDUCTOR WAFER TEST SYSTEMS
摘要 A semiconductor wafer prober is configured to rotate a semiconductor wafer into relative alignment with a wafer-interface probe adapted to simultaneously probe a number of integrated circuits within a sector of the semiconductor wafer. The wafer can include integrated circuits having different orientations, such that all of the integrated circuits within a given sector being tested have the same orientation. For example, a semiconductor wafer can include two semicircular sectors, with the integrated circuits on either sector having a common orientation rotated 180 degrees from a common orientation of the integrated circuits of the other sector. A wafer- interface probe, or probe card, adapted to test the entire semicircular sector during a single touch down is able to test the entire wafer with one rotational translation between testing.
申请公布号 WO2008091550(A1) 申请公布日期 2008.07.31
申请号 WO2008US00708 申请日期 2008.01.18
申请人 TERADYNE, INC.;PARRISH, FRANK 发明人 PARRISH, FRANK
分类号 G01R31/28;G01R1/04;G01R1/073 主分类号 G01R31/28
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