发明名称 |
MEMS Device with movement limiting arrangement |
摘要 |
<p>A microelectromechanical systems (MEMS) device includes a frame, an actuator formed on the same layer as the frame and connected to the frame to be capable of performing a relative motion with respect to the frame, and at least one stopper restricting a displacement of the actuator in a direction along the height of the actuator. The MEMS device is fabricated by bonding a second substrate to a first substrate, forming the frame and the actuator by partially removing the first substrate, and forming the at least one stopper by partially removing the second substrate.</p> |
申请公布号 |
EP1950174(A2) |
申请公布日期 |
2008.07.30 |
申请号 |
EP20070120483 |
申请日期 |
2007.11.12 |
申请人 |
SAMSUNG ELECTRO-MECHANICS CO., LTD. |
发明人 |
JEONG, HEE-MOON;CHO, JIN-WOO;PARK, YONG-HWA;KIM, JUN-O;CHANG, SEOK-MO |
分类号 |
B81B3/00;G02B26/08;G02B26/10 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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