Method of Preparing a Substrate, Method of Measuring, Device Manufacturing Method, Lithographic Apparatus, Computer Program and Substrate,申请号EP20040257363-传众专利搜索

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法人/股东/高管

发明名称	Method of Preparing a Substrate, Method of Measuring, Device Manufacturing Method, Lithographic Apparatus, Computer Program and Substrate
摘要
申请公布号	EP1538485(B1)	申请公布日期	2008.07.30
申请号	EP20040257363	申请日期	2004.11.26
申请人	ASML NETHERLANDS B.V.	发明人	TEN BERGE, PETER;KEIJSERS, GERARDUS JOHANNES JOSEPH
分类号	G03F9/00;H01L21/02;H01L21/027;H01L21/68	主分类号	G03F9/00
代理机构		代理人
主权项
地址

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