发明名称 Method for separating amine borane complex from a plating solution
摘要 <p>A process for separation and environmentally benign disposal of amine borane complexes includes adsorbing amine borane complex onto a solid support, treating the adsorbed amine borane complex with an oxidizing agent in situ on the adsorbent thereby forming decomposition products without the formation of hydrogen gas, and collecting the decomposition products for disposal thereof.</p>
申请公布号 EP1415695(B1) 申请公布日期 2008.07.30
申请号 EP20030255683 申请日期 2003.09.11
申请人 EDWARDS VACUUM, INC. 发明人 WANG, QING MIN;JANGBARWALA, JUZER
分类号 B01D15/00;C02F1/28;B01J3/00;B01J20/34;C23C18/16 主分类号 B01D15/00
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