发明名称 |
Method for separating amine borane complex from a plating solution |
摘要 |
<p>A process for separation and environmentally benign disposal of amine borane complexes includes adsorbing amine borane complex onto a solid support, treating the adsorbed amine borane complex with an oxidizing agent in situ on the adsorbent thereby forming decomposition products without the formation of hydrogen gas, and collecting the decomposition products for disposal thereof.</p> |
申请公布号 |
EP1415695(B1) |
申请公布日期 |
2008.07.30 |
申请号 |
EP20030255683 |
申请日期 |
2003.09.11 |
申请人 |
EDWARDS VACUUM, INC. |
发明人 |
WANG, QING MIN;JANGBARWALA, JUZER |
分类号 |
B01D15/00;C02F1/28;B01J3/00;B01J20/34;C23C18/16 |
主分类号 |
B01D15/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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