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发明名称
POSITIVE-WORKING RESIST COMPOSITION AND METHOD FOR RESIST PATTERN FORMATION
摘要
申请公布号
KR100849058(B1)
申请公布日期
2008.07.30
申请号
KR20077001158
申请日期
2007.01.17
申请人
发明人
分类号
G03F7/039;C08F220/00;G03F7/033;H01L21/027
主分类号
G03F7/039
代理机构
代理人
主权项
地址
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