| 摘要 |
An exhaust damping apparatus for semiconductor equipment is provided to prevent malfunction of a valve by forming a handle for operating a pressure control valve of an exhaust damper. An exhaust damping apparatus for semiconductor equipment comprises a tubular type exhaust damper(10), a turning plate(20), a bushing member, a handle(40), and a fixing member(60). The tubular type exhaust damper is connected between a reaction chamber and an exhaust line. The turning plate rotates inside the exhaust damper and opens a path. The bushing member consists of a first bushing(31) and a second bushing(32) wherein uneven surfaces(32a,42a) are formed at its side section. The handle has a turning shaft(41) to penetrate the exhaust chamber via the bushing member. The turning shaft includes a stopper(42) having the uneven surfaces at its one side, and an operating part(43) to adjust the rotation angle of the turning shaft at its one end. The fixing member is elastically supported by a spring(50) toward an axial direction to be screw connected to the other section of the turning shaft.
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