发明名称 |
Vertical mount mass flow sensor |
摘要 |
A thermal mass flow meter for measuring flow rate of a fluid includes a conduit that is configured to receive the fluid and that defines a primary flow path between an inlet and an outlet of the conduit. The conduit is bound at least in part by a sensor receiving surface. A thermal sensor tube has a thermal sensing portion that is mounted relative to the sensor receiving surface in a direction substantially perpendicular to both the primary flow path and the sensor receiving surface. When the thermal mass flow meter is mounted in a vertical direction so that fluid within the conduit flows in the vertical direction along the primary flow path, fluid within the sensor tube flows in a horizontal direction so as to substantially prevent thermal siphoning when the sensor tube is heated. |
申请公布号 |
GB2446116(A) |
申请公布日期 |
2008.07.30 |
申请号 |
GB20080011056 |
申请日期 |
2006.11.03 |
申请人 |
MKS INSTRUMENTS INC |
发明人 |
JUNHUA DING;MICHAEL F L'BASSI;KAVEH H ZARKAR |
分类号 |
G01F1/684;G01F5/00;G05D7/06 |
主分类号 |
G01F1/684 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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