发明名称 Vertical mount mass flow sensor
摘要 A thermal mass flow meter for measuring flow rate of a fluid includes a conduit that is configured to receive the fluid and that defines a primary flow path between an inlet and an outlet of the conduit. The conduit is bound at least in part by a sensor receiving surface. A thermal sensor tube has a thermal sensing portion that is mounted relative to the sensor receiving surface in a direction substantially perpendicular to both the primary flow path and the sensor receiving surface. When the thermal mass flow meter is mounted in a vertical direction so that fluid within the conduit flows in the vertical direction along the primary flow path, fluid within the sensor tube flows in a horizontal direction so as to substantially prevent thermal siphoning when the sensor tube is heated.
申请公布号 GB2446116(A) 申请公布日期 2008.07.30
申请号 GB20080011056 申请日期 2006.11.03
申请人 MKS INSTRUMENTS INC 发明人 JUNHUA DING;MICHAEL F L'BASSI;KAVEH H ZARKAR
分类号 G01F1/684;G01F5/00;G05D7/06 主分类号 G01F1/684
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