| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a microwave plasma torch device capable of improving coaxiality of a coaxial waveguide and attaining an improved position-controlling action. <P>SOLUTION: The microwave plasma torch device produces a plasma torch by ionizing gas through the use of plasma wave power supplied. The device comprises the coaxial waveguide 31 having an internal conductor 2 and an external conductor 3. A tip of the internal conductor 2 and the external conductor 3 are both narrowed, and the external conductor 3 is reduced in diameter to have an external conductor limiting portion 8. The device further comprises: a microwave oscillator for supplying a microwave 1; an actuator 15 connected to the internal conductor 2 to move it in a coaxial direction with respect to the external conductor 3; a directional coupler 33 for measuring reflective power of the microwave 1; and a controller 19 that outputs an operation command to the actuator 15, defining the minimum reflective wave as a control target, and adjusts the relative positions of the internal conductor 2 and the external conductor 3 to optimum positions. In this device, the external conductor 3, the actuator 15 and the external conductor limiting portion 8 are supported by positional tilt adjusting mechanisms 12, 14 and 18, respectively. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
