<p>The arrangement has a diaphragm device arranged in an illumination ray path aligned on a sample. The device has diaphragm openings provided on a coated surface area. A surface area (2) has a coating that causes a negative shift of phase of light. Another surface area (3) has a coating that causes a positive shift of the phase. A diaphragm opening defining unit defines diaphragm openings provided on the surface areas. Another diaphragm opening defining unit defines diaphragm openings partially provided on the surface areas.</p>
申请公布号
EP1950596(A1)
申请公布日期
2008.07.30
申请号
EP20080001081
申请日期
2008.01.22
申请人
CARL ZEISS MICROIMAGING GMBH
发明人
DANZ RAINER;THIRASE, JAN DR.;SCHAFFER, JOERG DR.;VOGELGSANG, ANKE;ZOELFFEL, MICHAEL, DR.