| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide cerium abrasives in which a slurry state to be applied in actual polishing work is taken into consideration, and to provide a method for producing the same. Ž<P>SOLUTION: The cerium abrasives comprise lanthanum, cerium and a fluorine component, and have a pH of 7.0-10.5 when dispersed in pure water so as to have a slurry concentration of 20 wt%. In the method for producing the cerium abrasives, condition setting for the steps of fluorination and roasting is important. Preferred conditions are as follows: during fluorination, a fluorine component is added so that the ratio of the number of fluorine atoms to that of lanthanum atoms (F/La) in a raw material is 1.2-2.3, and during roasting, roasting temperature is set at 800-1200°C, and roasting time is set so that the ratio of the number of fluorine atoms to that of lanthanum atoms (F/La) in the raw material after roasting is 1.1-2.0. Ž<P>COPYRIGHT: (C)2005,JPO&NCIPI Ž</p> |
