发明名称 ANHYDROUS, LIQUID PHASE PROCESS FOR PREPARING HYDROXYL CONTAINING POLYMERS OF ENHANCED PURITY
摘要 An anhydrous, liquid phase process for preparing hydroxyl containing polymers of enhanced purity comprising the steps of polymerization, purification, transesterification, purification, catalyst removal, and solvent exchange. The resultant polymer in solution can be used directly, without further processing steps, to prepare a photoresist composition.
申请公布号 EP1497339(B1) 申请公布日期 2008.07.30
申请号 EP20030718361 申请日期 2003.04.10
申请人 DUPONT ELECTRONIC TECHNOLOGIES L.P. 发明人 SHEEHAN, MICHAEL, T.;SOUNIK, JAMES, R.
分类号 C08F6/04;C08F8/12;C08F6/02;C08F6/06;C08F8/00;C08J3/09 主分类号 C08F6/04
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