| 摘要 |
PROBLEM TO BE SOLVED: To obtain a waveguide which has superior heat resistance and reduced optical loss and which hardly causes double refraction by forming a core and a clad by a chemical vapor deposition(CVD) method. SOLUTION: A fluorine-contg. aromatic compd. is deposited to a prescribed thickness by CVD treatment on a substrate 1, such as silicon and quartz glass to form a lower clad layer 2. Then the fluorine-contg. aromatic compd. is deposited to a prescribed thickness by the CVD treatment to form a core layer 3. After an aluminum layer 4 is deposited by vapor deposition on the core layer 3, a photoresist is applied, exposed and developed to form a patterned resist layer 5. The part of the aluminum layer which is not covered with the resist layer 5 is removed by wet etching, and then the fluorine-contg. aromatic resin in the core layer part which is not covered with the resist layer 5, and the corresponding aluminum layer is removed by dry etching. Finally, the remaining aluminum layer 4 is removed by wet etching to produce a ridge optical waveguide. |
