| 摘要 |
PROBLEM TO BE SOLVED: To prevent processing irregularity such as etching irregularity caused by the accumulation of deposits on the surface of the substrate installation stand and to prevent a substrate from being sucked by the substrate installation stand. SOLUTION: The substrate is laid on a susceptor and treated within a treatment room of a treatment apparatus. Two or more convex parts 7 are formed on a base material in the susceptor 100". The susceptor 100" is rectangular. Two or more convex parts 7 constitute orthogonal lattice. An angleθin which one axis of the orthogonal lattice makes with one side of the rectangle exceeds 0 degree, and is≤45 degrees. COPYRIGHT: (C)2004,JPO&NCIPI |
