| 摘要 |
A micromotion mechanism having an ultrasonic motor includes: a fixing base (1); a moving element (3) supported to be movable in the moving axis direction with respect to the fixing base; an oscillation element (8) having a rectangular geometry including a first plane parallel to the moving axis direction and provided with a plurality of projections (9a,9b) and a second plane parallel to the first plane for exciting a plurality of oscillation modes by applying a high frequency voltage signal, and a holding mechanism (9) for holding the oscillation element with respect to the fixing base (1). The holding mechanism (5) is fixed to a part of the second plane of the oscillation element, and is incorporated with a high rigidity material not including high nonlinearity elements including at least one of a friction sliding unit and a rubber member. |
