ANGLE CALIBRATING APPARATUS AND METHOD OF EVALUATING SYSTEM FOR DRIVING CHARACTERISTIC OF SCANNER

摘要

Angle calibrating apparatus and method of an evaluating system for a driving characteristic of a scanner are provided to reduce a calibration time through dynamic calibration. An angle calibrating apparatus of an evaluating system for a driving characteristic of a scanner includes a scanning mirror(100), a rotation device, and a moving device. The scanning mirror reflects light from a light source(101) through an object lens(102). The rotation device rotates the scanning mirror at a predetermined angle and includes a galvanometer(110) mounting the mirror on a center of a rotation axis. The moving device moves the scanning mirror along a focal direction to compensate variation of a focal length of the objective lens in rotating the scanning mirror. The moving device includes a piezoelectric actuator(120) to lift the rotation device in the focal direction.