MEMS DEVICE AND FABRICATION METHOD OF THE SAME

摘要

An MEMS(MicroElectroMechanical System) device and a fabrication method of the same are provided to suppress damage due to an external impact and an increase of cost by having a stopper to restrict a vertical displacement of a driving body. An MEMS device(100) includes a frame(111), a driving body(115), and at least one stopper. The driving body is formed on the same layer as the frame and is movably connected to the frame. The stopper restricts vertical displacement of the driving body. The stopper has ascent restricting stoppers(140) and descent restricting stoppers(150). The ascent restricting stopper restricts upward displacement of the driving body. The descent restricting stopper restricts downward displacement of the driving body. The ascent restricting stopper is fixed to the frame and has one end spaced apart from the driving body in case that the driving body is not displaced. The descent restricting stopper is fixed to the frame and has one end spaced apart from the frame in case that the driving body is not displaced.