发明名称 Process for fabricating chip embedded package structure
摘要 A process for fabricating a chip embedded package structure is provided. A stiffener is disposed on a tape. A chip is disposed on the tape inside a chip opening of the stiffener such that an active surface of the chip faces the tape. Through holes are formed passing the tape and exposing bonding pads of the chip on the active surface respectively. Conductive material is deposited into the though holes to form a plurality of conductive vias which are connected to the bonding pads respectively. A multi-layered interconnection structure is formed on the tape on the opposite of the chip, wherein the multi-layered interconnection structure comprises an inner circuit which is connected to the conductive vias, and the inner circuit has a plurality of metallic pads on a surface of the multi-layered interconnection structure away from the tape.
申请公布号 US7405103(B2) 申请公布日期 2008.07.29
申请号 US20050319844 申请日期 2005.12.27
申请人 VIA TECHNOLOGIES, INC. 发明人 CHANG WEN-YUAN
分类号 H01L21/00;H01L23/31;H01L23/48;H01L23/538;H01L23/544 主分类号 H01L21/00
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