发明名称 Driving mechanism and micro-mirror device provided with the same
摘要 A driving mechanism configured to turn a plate member with respect to a frame member around a predetermined turning axis includes a pair of supporting members supporting the plate member, a pair of actuators provided on both sides with respect to the turning axis and on the same surface side of the plate member. Each of the actuators includes a fixed electrode unit fixed to the frame member and a movable electrode unit fixed to the plate member. The fixed electrode unit includes a substrate, a pair of fixed comb electrodes provided on both surface sides of the substrate. The movable electrode unit includes a pair of movable comb electrodes, each of which engages with the corresponding fixed comb electrode with a gap therebetween. Both pairs of the fixed comb electrode and the corresponding movable comb electrode are configured such that a voltage can be applied therebetween independently.
申请公布号 US7405506(B2) 申请公布日期 2008.07.29
申请号 US20050201316 申请日期 2005.08.11
申请人 TOHOKU UNIVERSITY;HOYA CORPORATION 发明人 ESASHI MASAYOSHI;KIKUCHI NAOKI;MIZUNO ROGERIO JUN;MAEDA MASANORI;KARASAWA SATOSHI
分类号 H02N1/00;G02B26/08 主分类号 H02N1/00
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