| 摘要 |
The present inventions pertain to a method of applying a solid protective coating to articles, to a system capable of depositing a solid film layer on articles, and to hermetically sealed articles. In particular, films are deposited on fused quartz substrates, optical fibers, and other items requiring a hermetic seal by a single or multiple beams laser-induced chemical vapor deposition [LCVD]. According to the present inventions, the protective layer can be deposited on the articles to be hermetically sealed in an open environment at atmospheric pressure and ambient temperature whereby the coating process may occur outside the confines of an enclosure. A coaxial precursor and non-reactive laminar gas jet configuration insulates the deposition area from oxygen and other aerial impurities. Moreover, the present inventions insulate items from corrosion resulting from hydrogen or water penetrating the items' surfaces, maintain the items' mechanical properties, and preserve the integrity of optical signal transmission of optical fibers.
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