发明名称 Versatile semiconductor test structure array
摘要 This invention discloses a semiconductor test structure array comprising a plurality of unit cells for containing devices under test (DUT) arranged in an addressable array, and an access-control circuitry within each unit cell for controlling accesses to one or more DUTs, wherein the access-control circuitry comprises at least four identical controlled transmission gates (CTGs), and a plurality of the access-control circuitries are isomorphic.
申请公布号 US7405585(B2) 申请公布日期 2008.07.29
申请号 US20060522069 申请日期 2006.09.15
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. 发明人 DOONG YIH-YUH
分类号 G01R31/02;G01R31/26 主分类号 G01R31/02
代理机构 代理人
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