Method of forming optical images, apparatus for carrying out said method and process for manufacturing a device using said method

摘要

An optical image is formed in a resist layer ( 5 ) by a number of subilluminations, in each of which an array of light valves ( 21 25 ) and a corresponding array ( 40 ) of light converging elements are used to form a pattern of spots in the resist layer according to a sub image Between the sub illuminations, the resist layer ( 5 ) is displaced relative to the arrays ( 21 25, 40 ) The scale of the optical image in the resist layer ( 5 ) is measured and this scale is compared with the scale of the image required to be written If there is a difference, the spacing between the light converging elements ( 43 ) is physically altered to adjust the substrate scale.