| 摘要 |
<p>Apparatus And Methods For Pumping High Viscosity Fluids A system for dispensing and filtering fluid is disclosed, in which the fluid flow path is substantially vertical from the fluid inlet (12) through fluid dispense (168). Substantially all wetted surfaces are of a non-contaminating material to the fluid processed, for applications such as clean room processes. A valve (140) and a filter chamber (27) are incorporated into a pump head (120) to simplify the flow path and reduce potential contamination points. Preferred methods, and chips or other microelectronic devices fabricated from the apparatus or methods, are also disclosed.</p> |
