| 摘要 |
<p>A method for adjusting the distribution of light intensity, a method for estimating the distribution of light intensity, an exposure device using a device having the distribution of light intensity adjusted by the method, and a method for preparing a device by using the exposure device are provided to allow the distribution of light intensity to be adjusted by considering both the external shape and the ununiformity of the distribution of light intensity. A method for adjusting the distribution of light intensity comprises the steps of measuring the first distribution of light intensity; (T4) integrating the light intensity of each point in the region of the measured first distribution of light intensity in the circumference direction to a certain center point to obtain a first east longitude distribution of light intensity, and integrating the light intensity of each point in the region of the second distribution of light intensity in the circumference direction to a certain center point to obtain a second east longitude distribution of light intensity; (T5) integrating the first east longitude distribution of light intensity in the circumference direction to the center point to obtain a first integration distribution of light intensity of semicircular direction, and integrating the second east longitude distribution of light intensity in the circumference direction to the center point to obtain a second integration distribution of light intensity of semicircular direction; (T6) obtaining the difference at the each corresponding point of at least three corresponding points between the first integration distribution of light intensity and the second integration distribution of light intensity; and (T7) adjusting the first distribution of light intensity based on the difference between the first integration distribution of light intensity and the second integration distribution of light intensity.</p> |
